Brand New Refurbish Installation Modify Parts sale Repair Overhaul |
SPUTTERING SYSTEM
Cluster/In-line Sputtering System | |
Al, Ti, Cu, Sus, Mo, ITO, SiO2, TiO2, SiN, CrOx, ZnO, AZO | |
Thickness Uniformity : < ±5 | |
Uniformity of RTR : < ±3% | |
Heat uniformity : <± 3% | |
Power Supply : DC, Pulsed DC, RF |
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